Compound Semiconductors

This program involves faculty members from all five of the academic departments participating in MICROFABRITECH. These researchers are working in the areas of growth, processing, characterization, and fabrication of compound semiconductor materials and devices for electronic, optical, electro-optic, and opto-electronic applications. Strong participation by industry accelerates the rate of progress and helps focus research on important technological problems.

This program focuses on wide bandgap materials. For GaAs, the emphasis is on device processing and device design; for InAlGaN, the emphasis is on the materials processing and devices. For II - VI compounds, the emphasis is on activated luminescence.

Currently the program encompasses research for GaN substrate growth. Epitaxial layers are generally grown on these substrates. The research emphasizes both homoepitaxy as well as heteroepitaxy. Current techniques include molecular beam epitaxy (MBE), metal organic molecular beam epitaxy (MOMBE), and metal organic chemical vapor deposition (MOCVD).

A variety of processing techniques are being developed for producing integrated circuits and opto-electronic devices from these compound semiconductors. These include dry etching, contact metallization, and development of insulators.

Techniques for charactering damage and dopants, ion implantation, rapid thermal annealing, passivation, and contact resistance are in place. A variety of experimental methods are used to characterize properties, including cross-sectional transmission electron microscopy, photoluminescence, electroluminescence, cathodoluminscence, deep-level transient spectroscopy, secondary ion mass spectrometry, Auger electron spectroscopy, x-ray photoelectron spectroscopy, etc.

The devices being developed display unique characteristics not previously observed. Multiple quantum wells and superlattices offering potential high mobility of electronic charge, and carrier confinement for diode lasers are being developed for low threshold current, long-lifetime devices. The origin of noise in detectors is being studied to develop high-efficiency, low noise detectors. Optical materials for wave guiding and optical signal processing will be combined with these sources and detectors to produce optoelectronic integrated circuits (OIECs).

Some examples of current research: