UF | Microfabritech University of Florida
 
 

 
 
Microfabritech at the University of Florida, Gainesville
 

Facility Equipment

Annealing Equipment
Sulfide Furnace
Heatpulse Annealing Furnace
RTA
Dry Etching
RIE

Characterization Equipment
Optical Bench
Profilometer
SEM
SIMS

Epitaxy & CVD Equipment
MOMBE
PMEE
QMOVPE
VPE

Film Deposition Equipment
Edwards E-BEAM
Thermal Evaporator
Oxide Sputter Deposition System
Sputter Deposition System

Facility Links:
* Access/Visiting
* Equipment Forms

 
University of Florida