Facility Equipment


Annealing Equipment
Sulfide Furnace
Heatpulse Annealing Furnance
RTA
Dry Etching
RIE

Characterization Equipment
Optical Bench
Profilometer
SEM
SIMS

Epitaxy & CVD Equipment
MOMBE
PMEE
QMOVPE
VPE

Film Deposition Equipment
Edwards E-BEAM
Thermal Evaporator
Oxide Sputter Deposition System
Sputter Deposition System


Facility Links:

Facility Access/Visiting
Facility Equipment Forms