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Metallorganic Molecular Beam Epitaxy (MOMBE)
Principal Investigator: Dr. Cammy Abernathy
Molecular
Beam Epitaxy (MBE) of III-V compound semiconductors is carried out in a
modified Varian Gen II (MOD Gen II) growth system. The MBE technique
allows individual atomic layers to be deposited one layer at a time in
the controlled high vacuum (~5 X 10-9 torr) environment of the central
growth chamber. The system is configured to enable both gas source
molecular beam epitaxy (GSMBE) and metallorganic molecular beam epitaxy
(MOMBE) of Group III nitrides, phosphides, arsenides, and antimonides.
The system can accommodate up to six metallorganic or dopant bubbler
sources, such as triethylgallium, trimethylgallium, trimethylindium,
dimethylethylamine alane, silicon tetrabromide, carbon tetrabromide, or
biscyclopentadienylmagnesium. The bubbler source materials are
introduced into the growth chamber by an injector head via a
sophisticated gas delivery system, controlled from a PC running LabviewÔ
control software. Recirculating temperature baths are also used to
control the bubbler temperatures during growth. The system also contains
four shuttered effusion cells to enable standard solid source MBE growth
of III-V materials. These cells in the past have been used to provide
atomic beams of Ga, In, Sb, Mn, Eu, Er, and Tl. A high temperature
thermal cracker for hydrides attached to the system provides atomic
beams of P and As from bottles of PH3 and AsH3. Finally, atomic nitrogen
in provided by a separate RF cracker unit. Samples are manipulated by
way of a magnetic trolley system that can move up to sixteen separate
sample blocks at one time from the system load lock to the growth
chamber by way of an intermediary high vacuum buffer chamber. The sample
blocks are removed from the trolley into the growth chamber by a
manipulator arm. The load lock is accessed through a clean hood. Rough
and high vacuum for the load lock, buffer chamber, and growth chamber is
provided by three mechanical roughing pumps, two molecular drag pumps,
one turbomolecular pump, one ion pump, and two cryopumps.
For more information, contact Dr.
Cammy Abernathy: (352) 846-1087
http://www.mse.ufl.edu/~caber/
Facility Links:
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