Oxide Sputter Deposition System

Principal Investigator: Dr. Paul Holloway
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The oxide system is an RF magnetron sputtering tool that is used for the deposition of oxide insulators, transparent conductors, and (Zn, Ga) phosphors and well as for III-V nitride based phosphors. It houses three 1” sources used for combinatorial studies of doped nitrides as well the larger 8” guns which are used for routine deposition of oxides. Provision is made for sputtering in inert as well as reactive atmospheres.

For more information, contact Dr. Mark Davidson: (352) 846-2083

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