Heatpulse 4100 RTA (Rapid Thermal Annealing)

Principal Investigator: Dr. Paul Holloway

Used to “bake” samples in specific atmospheres at high temperature. Samples are either in the form of thin circular wafers or other samples can be laid down on a blank wafer for processing. A robotic arm uses a vacuum to pick up and hold samples. The arm places the sample into a quartz tube oven for processing and then removes the sample, which it delivers to a cooling station and an unloading tray. The system is capable of heating samples at a controllable rate of up to 250°C per second up to a maximum temperature of 1400°C.

For more information, contact Dr. Mark Davidson: (352) 846-2083

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